| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately and easily measure the density of electrons in plasma. <P>SOLUTION: A tubular member 4 formed of a dielectric material is provided in a range from the sidewall on one side of a plasma generation chamber 2 via a plasma generation region toward the sidewall on the other side. An antenna probe 5 is slid therein which consists of a coaxial cable 51 having an antenna portion 52, and a conductive member 53 provided on the front side in the moving direction of the antenna portion 52 via a gap. A network analyzer 7 is connected to the coaxial cable 51 for finding the absorption frequency of high frequency waves in an axial symmetry mode. In accordance with the absorption frequency, the density of electrons in plasma is computed. The absorption frequency obtained by using the antenna probe 5 is highly reliable, and so the density of electrons can be found with high accuracy. The antenna probe 5 is simply slid inside the tubular member 4, and so it can be easily moved while securing air tightness, resulting in easy measurement. <P>COPYRIGHT: (C)2009,JPO&INPIT |
