SPATIALLY CHIRPED PULSES FOR FEMTOSECOND LASER ABLATION THROUGH TRANSPARENT MATERIALS

摘要

Temporal focusing of spatially chirped femtosecond laser pulses overcomes previous limitations for ablating high aspect ratio features with low numerical aperture (NA) beams. Simultaneous spatial and temporal focusing reduces nonlinear interactions, such as self-focusing, prior to the focal plane so that deep (~1 mm) features with parallel sidewalls are ablated at high material removal rates.