| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibrating piece and a piezoelectric device which are capable of manufacturing a small or micro piezoelectric vibrating piece provided with a vibrating arm having a groove with high dimension accuracy. <P>SOLUTION: In the manufacturing method, the piezoelectric vibrating piece 32 provided with a base portion 51 and a plurality of vibrating arms 34, 35 extending in parallel from this base portion and having grooves 56, 57 extending in a lengthwise direction on each vibrating arm is formed by wet etching of a substrate made of a piezoelectric material. In this method of manufacturing a piezoelectric vibrating piece, the length (t) of each of the vibrating pieces 34, 35 and an etching time are adjusted, thereby eliminating a variant portion 15 to be formed by etching anisotropy on at least the vibrating pieces. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
