FAST PHASE PROCESSING OF OFF-AXIS INTERFEROGRAMS

摘要

Techniques for extracting phase data of off-axis interferogram images are disclosed. At least one sample-related interferogram image associated with a sample is spectrally decomposed to obtain a set of frequency components thereof, and a portion of the set of frequency components is used to generate at least one complex image having a reduced size being smaller in size than the sample-related interferogram image and being indicative of the phase data of the at least one sample-related interferogram image. The reduced size complex image is then used to generate a phase image of the least one sample-related interferogram image.

主权项

1. A computer-implemented method of extracting phase data of off-axis interferogram images, the method comprising:
(i) receiving at least one sample-related interferogram image associated with a sample; (ii) performing spectral decomposition to said at least one sample-related interferogram image to obtain a set of frequency components thereof; (iii) generating from a portion of said set of frequency components at least one complex image having a reduced size being smaller in size than said sample-related interferogram image and being indicative of said phase data; (iv) using said reduced size complex image to generate a phase image of said least one sample-related interferogram image.