ELECTROSTATIC CHUCK

摘要

PURPOSE: An electrostatic chuck is provided to have stable adsorption and support capacity by dividing a dielectric layer into a trench part and an embossing part. CONSTITUTION: A conductive layer is connected to a power supply unit. A dielectric layer(100) is divided into an embossing part(E) and a trench part(T). The trench part is arranged in an edge portion of the dielectric layer. The trench part comprises one or more channels(121). The embossing part is formed at the inner portion of the dielectric layer. The embossing part has a plurality of protrusions(122).