发明名称 |
FLOW-FORMED CHAMBER COMPONENT HAVING A TEXTURED SURFACE |
摘要 |
A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates. |
申请公布号 |
KR20080033536(A) |
申请公布日期 |
2008.04.16 |
申请号 |
KR20087005779 |
申请日期 |
2006.09.11 |
申请人 |
APPLIED MATERIALS INC. |
发明人 |
ABNEY STEPHEN E.;VESCI ANTHONY;SOMMERS JOSEPH F.;SCHWEITZER MARC O.;DICKERSON SCOTT;TILLER JENNIFER |
分类号 |
C23C14/56;B21D53/00;H01L21/00 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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