Microwave frequency component controlled by a system of shielded coplanar electrodes, and corresponding manufacturing method

摘要

A microwave frequency component includes a thin layer of dielectric material arranged between an earth electrode and a control electrode controlling a microwave frequency electrical signal such that the earth electrode extends over a first face, called the lower face, of the thin layer of dielectric material, and the control electrode extends longitudinally over a second face, called the upper face, of the thin layer of dielectric material. The microwave frequency component is such that it includes a set of at least two shielded coplanar electrodes extending along the entire length of the control electrode, to each side of and at an equal distance from the control electrode.

主权项

1. A microwave frequency component comprising:
a layer of dielectric material, formed by at least one thin layer, laid out between a ground electrode and a control electrode for controlling a microwave frequency electrical signal, such that: the ground electrode extends on a first face, called a lower face, of the layer of dielectric material, the control electrode extends longitudinally on a second face, called an upper face, of the layer of dielectric material; and a set of at least two coplanar electrodes extending all along the control electrode on either side of and at equal distance from the control electrode, wherein a distance G between the control electrode and each of said coplanar electrodes and a thickness h of the layer of dielectric material satisfy the following inequality: 1.2≦G/h<2.