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发明名称
DUMMY WAFER STRUCTURE FOR USE IN SEMICONDUCTOR DEVICE FABRICATION EQUIPMENT
摘要
申请公布号
KR20070045384(A)
申请公布日期
2007.05.02
申请号
KR20050101581
申请日期
2005.10.27
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KANG, JI HUN
分类号
H01L21/68;H01L21/02
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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