| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL element which is superior in characteristics such as a light-emission life and adhesion to a substrate without causing thermal deterioration or the like even in the case that an organic material which is film-formed by a wet process is annealing-treated, and a manufacturing device. SOLUTION: This manufacturing method of the electroluminescent element has an organic EL layer composed of one layer or a plurality of organic functional layers, and has a process to form at least one organic functional layer by coating a solution containing an organic functional material on a substrate, and a process to swell the organic functional layer by a solvent soluble to the organic functional layer, and to heat for annealing treatment. COPYRIGHT: (C)2009,JPO&INPIT
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