LASER ANNEALING APPARATUS

摘要

The present invention provides a laser annealing apparatus. For the laser annealing apparatus which can effectively correct a change of a laser beam profile according to use, the laser annealing apparatus comprises a laser beam source which can emit a laser beam, a control mirror which controls the light path of the laser beam emitted from the laser beam source, a homogenizer which is located on the light pass of the laser beam emitted from the laser beam source, a detector which can measure the intensity of the laser beam on the focus surface of the homogenizer, and a control part which can control the control mirror according to information obtained by the detector.