| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique for forming a lithium secondary battery under a dry environment. <P>SOLUTION: A thin film lithium secondary battery formation device 1 has: a movement chamber 2 formed into a shape having a longitudinal direction; an inlet door 81 and an outlet door 82 provided at one end and the other end in the longitudinal direction of the movement chamber 2, and capable of connecting and blocking atmospheric air and the movement chamber 2; a moving mechanism arranged in the movement chamber 2, and moving a substrate 70 carried in the movement chamber 2 from an upstream side to a downstream side while the inlet door 81 side is upstream and the outlet door 82 side is downstream; and a plurality of partition devices 83 provided in a moving direction of the substrate in the movement chamber 2, and serially parting the movement chamber 2 into plural regions between the inlet door 81 and the outlet door 82. A gas introduction device 55 for making an internal atmosphere of the movement chamber 2 into a rare gas atmosphere is connected to the movement chamber 2 between the inlet door 81 and the outlet door 82. Rare gas is introduced inside the movement chamber 2 by the gas introduction device 55, so as to form a lithium secondary battery under a dry environment. <P>COPYRIGHT: (C)2013,JPO&INPIT |
