发明名称 Die-bonding machine
摘要 In a die-bonding machine for picking up a number of semiconductor pellets arranged in the form of a pellet array, one by one, to place a picked-up semiconductor pellet on a predetermined position, when an estimated X-direction coordinate position of the semiconductor pellet to be picked up in relation to the pellet supporting and displacing mechanism is assumed as being "x" by considering a center point of the pellet supporting and displacing mechanism as the origin of the coordinates in the X direction, the pellet supporting and displacing mechanism and the pellet picking-up and carrying mechanism are displaced so that an X-direction coordinate position PX of the pick-up position takes a position expressed by the following equation (1) and an X-direction coordinate position CX of the center point of the pellet supporting and displacing mechanism takes a position expressed by the following equation (2):PX=Ax(1)CX=-(1-A)x(2)where 0<A<1.
申请公布号 US6149047(A) 申请公布日期 2000.11.21
申请号 US19990339029 申请日期 1999.06.23
申请人 NEC CORPORATION 发明人 ODA, NORIO
分类号 H01L21/52;H01L21/00;H01L21/50;H01L21/68;(IPC1-7):B23K3/04;B23K3/06;B23K1/002;B23K1/005;B23K1/008 主分类号 H01L21/52
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