发明名称 PROCESS FOR PRODUCING FLEXIBLE ORGANIC-INORGANIC LAMINATES
摘要 The present invention is in the field of processes for producing flexible organic-inorganic laminates as well as barrier films comprising flexible organic-inorganic laminates by atomic layer deposition. In particular, the present invention relates to a process for producing a laminate comprising (a) depositing an inorganic layer by an atomic layer deposition process, and (b) depositing an organic layer comprising selenium by a molecular layer deposition process.
申请公布号 WO2016116245(A1) 申请公布日期 2016.07.28
申请号 WO2015EP80988 申请日期 2015.12.22
申请人 BASF COATINGS GMBH 发明人 AHLF, MARAIKE;FRANK, JUERGEN;ADERMANN, TORBEN;KLOTZ, STEPHAN
分类号 C23C16/455;H01L51/52 主分类号 C23C16/455
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