发明名称 |
PROCESS FOR PRODUCING FLEXIBLE ORGANIC-INORGANIC LAMINATES |
摘要 |
The present invention is in the field of processes for producing flexible organic-inorganic laminates as well as barrier films comprising flexible organic-inorganic laminates by atomic layer deposition. In particular, the present invention relates to a process for producing a laminate comprising (a) depositing an inorganic layer by an atomic layer deposition process, and (b) depositing an organic layer comprising selenium by a molecular layer deposition process. |
申请公布号 |
WO2016116245(A1) |
申请公布日期 |
2016.07.28 |
申请号 |
WO2015EP80988 |
申请日期 |
2015.12.22 |
申请人 |
BASF COATINGS GMBH |
发明人 |
AHLF, MARAIKE;FRANK, JUERGEN;ADERMANN, TORBEN;KLOTZ, STEPHAN |
分类号 |
C23C16/455;H01L51/52 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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