| 摘要 |
PROBLEM TO BE SOLVED: To provide a focus maintenance device that detects both signals from two reference surfaces to thereby sense a change-over of the reference surface, and causes a focus of an objective lens to be maintained at a desired position, and to provide a microscope that includes the focus maintenance device.SOLUTION: A focus maintenance device 110, which maintains a focusing surface of an objective lens 12 of a microscope 100 at a prescribed position of a sample 40, includes: a separation information giving unit (color filter 3a) that gives AF light radiated from an AF light source 1 two different separation information; a defocus information giving unit (phase mask 3b) that gives the AF light separated by the color filter 3a defocus information causing the objective lens 12 to converge the AF light for each separation information to a position different in an optical axis direction; a detection unit (optical detector 9) that outputs detection information for each separation information from the AF light reflected upon at least one reference surface of two reference surfaces owned by the sample 40; and a control unit 50 that maintains the focusing surface of the objective lens 12 at the prescribed position of the sample 40 on the basis of the detection information.SELECTED DRAWING: Figure 1 |
