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发明名称
Vakuumbeschichtungsanlage mit motorisch angetriebener Drehkathode
摘要
申请公布号
DE502005006069(D1)
申请公布日期
2009.01.08
申请号
DE200550006069T
申请日期
2005.08.10
申请人
APPLIED MATERIALS GMBH & CO. KG
发明人
SAUER, ANDREAS
分类号
C23C14/34;H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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