| 摘要 |
<p>The detector has a structural substrate and a detection element comprising a membrane (16) sensitive to electromagnetic radiation and suspended above the substrate. A distance between the membrane and the substrate is variable, and has a predefined spatial distribution for minimizing rapid variations of a response of the detector to the radiation in a predefined wavelength range. The membrane comprises a bolometric material e.g. metal oxide, sensitive to a temperature variation resulting from exposure to infrared radiation. An independent claim is also included for a method for manufacturing an electromagnetic radiation detector.</p> |
