发明名称 樹脂封止装置及び樹脂封止方法
摘要 In a carrier for conveying resin blocks, a channel is formed inside a wall in a receiving part for receiving the resin blocks, and cooling medium is supplied to the channel to make the cooling medium flow to cool the resin blocks. Therefore, influences of radiation heat of a heated clamp or a first formed die and a second formed die can be prevented, and the temperature of the resin blocks can be constantly maintained and managed to prevent the resin blocks from degradation or deterioration.
申请公布号 JP5985402(B2) 申请公布日期 2016.09.06
申请号 JP20130001303 申请日期 2013.01.08
申请人 TOWA株式会社 发明人 高田 直毅;尾張 弘樹;竹内 慎
分类号 H01L21/56 主分类号 H01L21/56
代理机构 代理人
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