| 摘要 |
An edge termination region (100) which surrounds an active region (101) includes an electric field reduction mechanism including guard rings (2), first field plates (4) which come into contact with the guard rings (2), and second field plates (7) which are provided on the first field plates (4), with an interlayer insulating film (5) interposed therebetween. The second field plate (7) is thicker than the first field plate (4). A gap between the second field plates (7) is greater than a gap between the first field plates (4). A barrier metal film (6) is provided between the second field plate (7) and the interlayer insulating film (5) so as come into conductive contact with the second field plate (7). A gap between the barrier metal films (6) is equal to the gap between the first field plates (4). Therefore, even in a structure including the first and second field plates (4, 7), it is possible to improve the effect of shielding an external charge. |
