| 发明名称 |
INTEGRATED CIRCUIT DEVICE AND METHOD FOR MANUFACTURING THE SAME |
| 摘要 |
According to one embodiment, an integrated circuit device includes a pillar extending in a first direction and a plug that is connected to an end part of the pillar on a longitudinal direction side. A contact face between the pillar and the plug including a portion inclined relative to a plane perpendicular to the first direction. |
| 申请公布号 |
US2016268289(A1) |
申请公布日期 |
2016.09.15 |
| 申请号 |
US201514656927 |
申请日期 |
2015.03.13 |
| 申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
NODA Kotaro |
| 分类号 |
H01L27/115;H01L23/535 |
主分类号 |
H01L27/115 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An integrated circuit device, comprising:
a pillar extending in a first direction; a plug that is connected to an end part of the pillar on a longitudinal direction side, a contact face between the pillar and the plug including a portion inclined relative to a plane perpendicular to the first direction. |
| 地址 |
Minato-ku JP |
