| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high speed conveyer device and conveying method of double hand in a link system of high rigidity structure, without providing rate- determining even when a process time is shortened in a semiconductor manufacture device of multi-chamber system, increasing a number of processing sheets and decreasing a number of component items. SOLUTION: A total of four second arms respectively of two second arms 32, 33 are mounted in a tip end of first arms 30, 31 of double hand, respectively one by one a total of two holders are mounted in a tip end of these right/left two arms, this structure is formed capable of selecting independently forward advancing action of these two second arms, and the structure is formed capable of forward advancing action of arbitrary one holder of the two holders. In this way, a conveying machine of high tact time can be obtained by generating a double hand in a wafer conveying system device of link system. |
