| 摘要 |
A method for manufacturing a silicon carbide-based porous filter is provided to prevent problems that heat resistance of the silicon carbide particles is deteriorated, and it is difficult to obtain a uniform particle distribution of the silicon carbide particles by performing a post-treatment in a nitrogen atmosphere after completing sintering, thereby changing silicon remained on joining parts between silicon carbide particles into silicon nitrides. As a method for manufacturing a silicon carbide(SiC)-based porous filter by extrusion, drying, plugging, and sintering, the method comprises the process of nitriding residual silicon by performing a heat treatment again in a nitrogen atmosphere after completing the sintering in a method for forming joining parts between silicon carbide particles by adding silicon and carbon as sintering additives. The joining parts comprising SiC as a principal component is formed by reacting the sintering additives during the sintering. The heat treatment is performed at a temperature of 1200 to 1800 deg.C. The residual silicon after the sintering is charged into carbon nitride(Si3N4) by the nitrification reaction. A silicon carbide-based porous filter comprises SiC as a principal component on joining parts between SiC particles, comprises Si3N4 as the other component, and does not consist of silicon.
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