| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid pump capable of maintaining an optimal seal state for a long period, and attaining further high vacuum degree.SOLUTION: A fluid pump 1 comprises a first oscillation rotor 10X and a second oscillation rotor 10Y provided side by side along an axial direction of a main shaft 11 for oscillatably rotating an oscillation rotor 10. The fluid pump includes a contact force generation unit 44 that moves the first oscillation rotor 10X and the second oscillation rotor 10Y along the axial direction and in a direction of separating from each other, and then causes the first oscillation rotor 10X to contact with a side plate 18 on the first oscillation rotor 10X side, and the second oscillation rotor 10Y to contact with a side plate 19 on the second oscillation rotor 10Y side.SELECTED DRAWING: Figure 2 |
