| 摘要 |
<P>PROBLEM TO BE SOLVED: To automate the adjustment of a stub tuner and a sliding short used when a waveguide is used in a plasma generator used, for example, for treating a workpiece. <P>SOLUTION: A CPU 901 in an entire control section 90 adjusts the amount of projection/retraction of the stub of the stub tuner 70 provided for matching impedance by a reception antenna into a waveguide space so that the difference between incident power and reflection power to a plasma generation section 30 measured by respective power meter units 100A, 100B in a power meter 100, namely the propagation efficiency in microwaves, is maximized, and adjusts the position of the reflection block of the sliding short 40 provided for adjusting the pattern of the standing waves of microwaves in the waveguide 10. Thus, a fine adjustment can be made automatically and precisely. Even if the plasma generation nozzle 31 is replaced by the one having a different shape, plasma (plume P) lighting can be made easily. <P>COPYRIGHT: (C)2007,JPO&INPIT |
