INORGANIC CRYSTAL FILM AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an inorganic crystal film having such a film structure that can be utilized without reducing performance or reliability even when the inorganic crystal film is made into an element by laminating another kind of film thereon, and a manufacturing method therefor.

SOLUTION: An inorganic crystal film is formed on a substrate and has at least a two-layer structure in which a lower layer in contact with the substrate is a dense layer and a top layer of the film is a binding layer configured by binding particles with which the layer is filled are bound to each other. A manufacturing method for the inorganic crystal film includes a coating step of coating the substrate with a chemical solution containing metal species to be the inorganic crystal film, a drying step of drying the coating film obtained in the coating step, and a calcination step of calcining the dried film and repeats the coating step, the drying step and the calcination step as one set multiple times.

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