SUBSTRATE CARRYING DEVICE,申请号JP19960329639-传众专利搜索

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发明名称	SUBSTRATE CARRYING DEVICE
摘要
申请公布号	JPH10167468(A)	申请公布日期	1998.06.23
申请号	JP19960329639	申请日期	1996.12.10
申请人	DAINIPPON SCREEN MFG CO LTD	发明人	IKEDA FUMIHIKO;KITAYAMA ATSUHISA
分类号	B65G49/07;(IPC1-7):B65G49/07	主分类号	B65G49/07
代理机构		代理人
主权项
地址

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