| 摘要 |
<p>A manufacturing system (100, 300) includes a process tool (115), a controller agent (350), and a first processing agent. The process tool (115) is configured to process a workpiece (130) in accordance with an operating recipe. The controller agent (350) is configured to determine a control action associated with the processing of the workpiece (130) in the process tool (115). The first processing agent (320, 340) is associated with at least one of the process tool (115) and the workpiece (130) and configured to interface with the controller agent (350), receive the control action, and configure the operating recipe based on the control action. A method for controlling a process tool (115) configured to process a workpiece (130) in accordance with an operating is instantiated. A controller agent (350) configured to determine a control action associated with the processing of the workpiece (130) in the process tool (115) is instantiated. The first processing agent (320, 340) is interfaced with the controller agent (350) to receive the control action. The first processing agent (320, 340) is interfaced with the process tool (115) to configure the operating recipe based on the control action.</p> |
