SILICON WAFER EDGE PROTECTION DEVICE WITH COLLISION PROTECTION FUNCTION

摘要

A wafer edge protection apparatus, including an electrical control module having a servomotor, a vertical motion mechanism and a protection mechanism. The protection mechanism includes: a shaft coupler, in fixed connection with a shaft of the servomotor and having a plurality of first connecting components; and a transmission sleeve, in fixed connection with the vertical motion mechanism and having a plurality of second connecting components in movable connection with the plurality of first connecting components. The plurality of first connecting components is in movable connection with the plurality of second connecting components such that, in the event of a torque output by the shaft of the servomotor not exceeding a limit, the plurality of first connecting components is engaged with the plurality of second connecting components, and in the event of the torque output by the shaft of the servomotor exceeding the limit, the plurality of first connecting components is disengaged from the plurality of second connecting components, thereby preventing a rotational motion generated by the servomotor from transferring to the vertical motion mechanism.

主权项

1. A wafer edge protection apparatus, comprising an electrical control module and a vertical motion mechanism, the electrical control module comprising a servomotor for generating a rotational motion, wherein the wafer edge protection apparatus further comprises a protection mechanism comprising:
a shaft coupler, in fixed connection with a shaft of the servomotor and having a plurality of first connecting components; and a transmission sleeve, in fixed connection with the vertical motion mechanism and having a plurality of second connecting components in movable connection with the plurality of first connecting components such that in an event of a torque output by the shaft of the servomotor not exceeding a limit, the plurality of first connecting components are engaged with the plurality of second connecting components, thereby allowing transfer of the rotational motion generated by the servomotor to the vertical motion mechanism for driving the vertical motion mechanism to move vertically, and in an event of the torque output by the shaft of the servomotor exceeding the limit, the plurality of first connecting components are disengaged from the plurality of second connecting components, thereby preventing the rotational motion generated by the servomotor from transferring to the vertical motion mechanism.