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发明名称
FLAW INSPECTING APPARATUS
摘要
申请公布号
JPH02298879(A)
申请公布日期
1990.12.11
申请号
JP19890120726
申请日期
1989.05.15
申请人
SEIKO EPSON CORP
发明人
KAWASE TAKEO
分类号
G01R33/12;G01N21/88;G01N21/94;G01N21/95;G11B5/84;G11B7/26
主分类号
G01R33/12
代理机构
代理人
主权项
地址
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