| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor for a silicon microphone that is manufacturable at low cost, by facilitating miniaturization and light weight and possessing anti-vibration performance. SOLUTION: The end of a silicon plate 12 is made a frame body 19 and is fixed on a sheathing case 28 of the silicon microphone (pressure sensor) 10 by a jointing face 27 of the frame body 19. The pressure sensor forms an elastic part (vibration absorbing structure) 29 thinning a part of a silicon base material composing a silicon plate 12 at a boundary region of the frame body 19 of the silicon plate 12 and a diaphragm part 17. COPYRIGHT: (C)2006,JPO&NCIPI
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