| 摘要 |
PROBLEM TO BE SOLVED: To achieve a defect inspection device which can obtain the same image shift amount in all cameras without enlarging the device even if a plurality of cameras are used. SOLUTION: The defect inspection device processes image information in which each target area divided into a plurality of areas is photographed by a plurality of cameras with lens systems and area sensors which is consisted of a predetermined number of pixels, and discriminates defect of the areas based on a calculated feature quantity, The detection inspection device is provided with a camera board which fixedly arranges the plurality of the cameras, and an actuator means which periodically moves in a predetermined range in X, Y directions. COPYRIGHT: (C)2008,JPO&INPIT
|
