| 发明名称 |
VACUUM TWEEZER AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE |
| 摘要 |
A vacuum tweezer includes: a tweezer body including a suction distal end portion that performs vacuum suction of an object to be suctioned; and a light source causing a beam to be condensed at a position on an extension of the suction distal end portion on which a vacuum suction force acts. |
| 申请公布号 |
US2016247705(A1) |
申请公布日期 |
2016.08.25 |
| 申请号 |
US201514925297 |
申请日期 |
2015.10.28 |
| 申请人 |
Mitsubishi Electric Corporation |
发明人 |
SUMITANI Koichi |
| 分类号 |
H01L21/683;B25J11/00;B25J15/06 |
主分类号 |
H01L21/683 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A vacuum tweezer comprising:
a tweezer body including a suction distal end portion that performs vacuum suction of an object to be suctioned; and a light source causing a beam to be condensed at a position on an extension of the suction distal end portion on which a vacuum suction force acts. |
| 地址 |
Tokyo JP |
