| 发明名称 | Angular rate sensor | ||
| 摘要 | A rotation sensing device is presented. The device comprises: a proof mass arrangement comprising at least one pair of proof masses spaced-apart from one another along a first axis; a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams; and an actuation mechanism configured and operable to cause the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, thereby generating a sense-mode oscillatory movement of the proof masses during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation. | ||
| 申请公布号 | US9528830(B2) | 申请公布日期 | 2016.12.27 |
| 申请号 | US201414334216 | 申请日期 | 2014.07.17 |
| 申请人 | RAMOT AT TEL-AVIV UNIVERSITY LTD. | 发明人 | Gerson Yuval;Krylov Viacheslav;Bar-On Yotam |
| 分类号 | G01C19/5642;G01C19/574 | 主分类号 | G01C19/5642 |
| 代理机构 | Browdy and Neimark, P.L.L.C. | 代理人 | Browdy and Neimark, P.L.L.C. |
| 主权项 | 1. A rotation sensing device comprising a structure comprising: a proof mass arrangement comprising at least one pair of proof masses spaced-apart from one another along a first axis; a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams; an actuation mechanism configured and operable to apply an electrostatic force to the proof masses, causing deformation of the beams and periodic variation of the beams' stiffness, to thereby parametrically excite the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, thereby generating a sense-mode oscillatory movement of the proof masses during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation. | ||
| 地址 | Tel Aviv IL | ||