发明名称 TEST-LEAKAGE DEVICE
摘要 The invention relates to a test-leakage device comprising a tracer gas reservoir (12) and a tracer gas outlet (16), which is sealed by a membrane (30) consisting of silicon oxide. A heating device for heating the silicon oxide disc (32) is also provided. The permeability of silicon oxide to low-molecular gases is essentially dependent on its temperature, so that the leak rate of the test-leakage device can be modified and controlled by heating the silicon oxide membrane.
申请公布号 WO02090917(A2) 申请公布日期 2002.11.14
申请号 WO2002EP04902 申请日期 2002.05.04
申请人 INFICON GMBH;GERDAU, LUDOLF;WIDT, RUDI 发明人 GERDAU, LUDOLF;WIDT, RUDI
分类号 G01M3/00;G01M3/20 主分类号 G01M3/00
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