发明名称 Manufacturing method of optical devices
摘要 A first objective of the present invention is to provide a more productive method of manufacturing optical devices that minimizes processing distortion, maintains optical characteristics satisfactorily, and promotes smallness. A second objective thereof is to provide a method of manufacturing optical devices that prevents the occurrence of fine dust and maintains the optical characteristics satisfactorily. A third objective thereof is to provide a method of manufacturing optical devices of a multi-layer configuration that are obtained by applying a scribing/cutting method. A method of manufacturing optical devices in accordance with the present invention, wherein an optical wafer having surfaces polished to a mirror finish is divided into a plurality of optical chips, is provided with a first step of providing hairline cracks by a diamond blade edge in one main surface of the optical wafer and a third step of applying pressure along the hairline cracks after the first step, to divide the optical wafer into the plurality of optical chips.
申请公布号 US2005170084(A1) 申请公布日期 2005.08.04
申请号 US20040983940 申请日期 2004.11.08
申请人 TAKADA MOTOO;ADACHI KAZUMASA 发明人 TAKADA MOTOO;ADACHI KAZUMASA
分类号 G03B11/00;B05D5/06;C03B33/02;G02B27/46;H01L21/301;(IPC1-7):B05D5/06 主分类号 G03B11/00
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