发明名称 Superior integrity of high-k metal gate stacks by preserving a resist material above end caps of gate electrode structures
摘要 When forming high-k metal gate electrode structures in a semiconductor device on the basis of a basic transistor design, undue exposure of sensitive materials at end portions of the gate electrode structures of N-channel transistors may be avoided, for instance, prior to and upon incorporating a strain-inducing semiconductor material into the active region of P-channel transistors, thereby contributing to superior production yield for predefined transistor characteristics and performance.
申请公布号 US8481381(B2) 申请公布日期 2013.07.09
申请号 US201113232711 申请日期 2011.09.14
申请人 KRONHOLZ STEPHAN-DETLEF;JAVORKA PETER;WIATR MACIEJ;GLOBALFOUNDRIES INC. 发明人 KRONHOLZ STEPHAN-DETLEF;JAVORKA PETER;WIATR MACIEJ
分类号 H01L21/336;H01L21/8234 主分类号 H01L21/336
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