| 摘要 |
PROBLEM TO BE SOLVED: To form a highly accurate coating film by providing the backplate opposed to the disc-shaped substrate supported on a support stand at a predetermined interval and providing an air stream generator for supplying air streams flowing outwardly between the disc-shaped substrate and the backplate. SOLUTION: A spin coating apparatus is equipped with a support stand 2 for supporting a disc-shaped substrate 1 such as a photomagnetic disc or the like, the paint supply device 3 for supplying paint to the inner peripheral side end part of one main surface 1a of the disc-shaped substrate 1 supported on the support stand 2 and the backplate 4 arranged at the position opposed to the other main surface 1b of the disc-shaped substrate 1 supported on the suport stand 2. An air stream generator is provided in order to supply air from the gap between the support stand 2 and the backplate 4 to supply inert gas such as Ar gas or the like to the gaps formed between the side surface of the support stand 2, the other main surface 1b of the disc-shaped substrate 1 and the backplate 4 under predetermined pressure to generate air streams in the gaps.
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