发明名称 PROCESS FOR PRODUCING ORIENTED INORGANIC CRYSTALLINE FILM, AND SEMICONDUCTOR DEVICE USING THE ORIENTED INORGANIC CRYSTALLINE FILM
摘要 In a process for producing an oriented inorganic crystalline film, a non-monocrystalline film containing inorganic crystalline particles is formed on a substrate by a liquid phase technique using a raw-material solution which contains a raw material and an organic solvent, where the inorganic crystalline particles have a layered crystal structure and are contained in the raw material. Then, the non-monocrystalline film is crystallized by heating the non-monocrystalline film to a temperature equal to or higher than the crystallization temperature of the non-monocrystalline film so that part of the inorganic crystalline particles act as crystal nuclei.
申请公布号 US2009152506(A1) 申请公布日期 2009.06.18
申请号 US20080337072 申请日期 2008.12.17
申请人 FUJIFILM CORPORATION 发明人 UMEDA KENICHI;HIRAI HIROYUKI;TANAKA ATSUSHI;KOHDA KATSUHIRO;HIGASHI KOHEI;SUNAGAWA HIROSHI
分类号 H01B1/00;H01L21/20 主分类号 H01B1/00
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