| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate housing container capable of housing a reticle and a semiconductor wafer together in the same container, improving transportation efficiency, and reducing equipment, costs and the like by integrating a transportation line.SOLUTION: A substrate housing container comprises: a container body 1 capable of aligning and housing plural semiconductor wafers W; a lid body 10 opening/closing an opened front face of the container body 1; and an adapter 60 for mounting a reticle housing container 30 mounted in the container body 1. A robotic flange 4 is mounted to a ceiling of the container body 1, a pair of support pieces 2 supporting a semiconductor wafer W in almost parallel are opposed on both inner sides of the container body 1, and a stopper 3 for the semiconductor wafer W is formed on a front section of a surface of each support piece 2. Also, the adapter 60 is formed into a disc shape, and plural positioning bars 61 for the reticle housing container 30 are formed on an upper face of the adapter. Both sides of the adapter 60 are supported by the pair of support pieces 2, so as to prevent the adapter 60 from being displaced in a front face direction by the stopper 3 of each support piece 2. |
