发明名称 |
Beam homogenizer |
摘要 |
A beam homogenizer that minimizes undesired intensity variations at the output plane caused by sharp breaks between facets in previous embodiments. The homogenizer includes a hologram made up of irregularly patterned diffractive fringes. An input beam illuminates at least part of the hologram. The hologram transmits a portion of the input beam onto an output plane. In doing so, the energy of the input beam is spatially redistributed at the output plane into a homogenized output beam having a preselected spatial energy distribution at the output plane. Thus, the illuminated portion of the output plane has a shape predetermined by the designer of the homogenizer.
|
申请公布号 |
US6025938(A) |
申请公布日期 |
2000.02.15 |
申请号 |
US19980160322 |
申请日期 |
1998.09.25 |
申请人 |
DIGITAL OPTICS CORPORATION |
发明人 |
KATHMAN, ALAN D;FELDMAN, MICHAEL R. |
分类号 |
B23K26/06;G02B5/02;G02B5/18;G02B5/32;G02B27/09;G02F1/01;G03F7/20;G03H1/08;H01L21/027;H04B10/04;(IPC1-7):G03H1/00 |
主分类号 |
B23K26/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|