发明名称 Beam homogenizer
摘要 A beam homogenizer that minimizes undesired intensity variations at the output plane caused by sharp breaks between facets in previous embodiments. The homogenizer includes a hologram made up of irregularly patterned diffractive fringes. An input beam illuminates at least part of the hologram. The hologram transmits a portion of the input beam onto an output plane. In doing so, the energy of the input beam is spatially redistributed at the output plane into a homogenized output beam having a preselected spatial energy distribution at the output plane. Thus, the illuminated portion of the output plane has a shape predetermined by the designer of the homogenizer.
申请公布号 US6025938(A) 申请公布日期 2000.02.15
申请号 US19980160322 申请日期 1998.09.25
申请人 DIGITAL OPTICS CORPORATION 发明人 KATHMAN, ALAN D;FELDMAN, MICHAEL R.
分类号 B23K26/06;G02B5/02;G02B5/18;G02B5/32;G02B27/09;G02F1/01;G03F7/20;G03H1/08;H01L21/027;H04B10/04;(IPC1-7):G03H1/00 主分类号 B23K26/06
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