| 摘要 |
PROBLEM TO BE SOLVED: To reduce a power load, to increase the concentration of a solvent by supplying solvent vapor using a pressure difference without using any carrier gas, and to increase drying efficiency by allowing the solvent vapor to contribute to the substitution and drying of a treatment liquid efficiently. SOLUTION: A control section 67 reduces pressure in a chamber 27, and stops reducing pressure by exhaust pumps 19, 52 in vacuum and raises a lifter 31 to a drying position from a treatment position when a pressure detected by a pressure gauge 55 decreases below the vapor pressure curve of a solvent corresponding to the temperature of the solvent. The pressure is reduced below the vapor pressure curve, and a state, where the solvent becomes vapor easily, is achieved, thus generating solvent vapor sufficiently and reducing the power load even if the capacity of a heater 41 is small. The solvent vapor is introduced into the chamber 27 by the pressure difference, thus dispensing with the carrier gas and hence increasing the concentration of the solvent. COPYRIGHT: (C)2009,JPO&INPIT
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