发明名称 STORAGE AND CARRIAGE CASE OF ELECTRONIC MATERIAL
摘要 PROBLEM TO BE SOLVED: To prevent the occurrence of uneven deposition and defects due to an out gas that is generated from a case during storage and carriage of an electronic material and adheres to a material surface.SOLUTION: Vinylidene fluoride synthetic rubber is used for a packing material of a storage and carriage case of an electronic material thereby suppressing the occurrence of an out gas, enabling a seal surface to be sealed without causing gaps, and maintaining high cleanliness for a long period.
申请公布号 JP2013197513(A) 申请公布日期 2013.09.30
申请号 JP20120065965 申请日期 2012.03.22
申请人 TOSOH CORP 发明人 OKAMOTO MICHIO;ABE MASANORI;TAKATO SHUJI
分类号 H01L21/673;B65D81/26 主分类号 H01L21/673
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