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发明名称
摘要
申请公布号
JP4020533(B2)
申请公布日期
2007.12.12
申请号
JP19990121086
申请日期
1999.04.28
申请人
发明人
分类号
H01L21/56;B29C45/02;B29C45/14
主分类号
H01L21/56
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