HIGH-PURITY TUNGSTEN HEXACARBONYL FOR SOLID SOURCE DELIVERY
摘要
A solid source material is described for forming a tungsten-containing film. The solid source material is tungsten hexacarbonyl, wherein content of molybdenum is less than 1000 ppm. Such solid source material may be formed by a process including provision of particulate tungsten hexacarbonyl raw material of particles of size less than 5 mm, wherein particles of size greater than 1.4 mm are less than 15% of the particles, and wherein content of molybdenum is less than 1000 ppm, and sintering the particulate tungsten hexacarbonyl raw material at temperature below 100°C to produce the solid source material as a sintered solid.
申请公布号
WO2016144579(A1)
申请公布日期
2016.09.15
申请号
WO2016US19995
申请日期
2016.02.28
申请人
ENTEGRIS, INC.
发明人
BAUM, Thomas, H.;WRIGHT, Robert, L., Jr.;BATTLE, Scott, L.;CLEARY, John, M.