INSPECTION APPARATUS, IMAGE PROCESSING APPARATUS, METHOD OF OPERATING INSPECTION APPARATUS, IMAGE PROCESSING METHOD, AND RECORDING MEDIUM

摘要

Provided is an inspection apparatus, including: a measurement optics system configured to scan an object to be inspected with measuring light from a light source; a dividing unit, which is arranged at a position conjugate with the object to be inspected, and is configured to divide return light, being the measuring light returning from the object to be inspected, into a plurality of light beams; a photo-receiving unit configured to receive the plurality of light beams obtained by the division; a recording unit configured to record image data of the object to be inspected, which is based on a plurality of intensity signals output by the photo-receiving unit, and a division direction in which the return light is divided, the image date being associated with the division direction; and an analysis unit configured to analyze the image data based on the associated division direction.

主权项

1. An inspection apparatus, comprising:
a measurement optics system configured to scan an object to be inspected with measuring light from a light source; a dividing unit, which is arranged at a position conjugate with the object to be inspected, and is configured to divide return light, being the measuring light returning from the object to be inspected, into a plurality of light beams; a photo-receiving unit configured to receive the plurality of light beams obtained by the division; a recording unit configured to record image data of the object to be inspected, which is based on a plurality of intensity signals output by the photo-receiving unit, and a division direction in which the return light is divided, the image date being associated with the division direction; and an analysis unit configured to analyze the image data based on the associated division direction.