| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical measurement device and optical measurement method that are excellent in performance.SOLUTION: An optical measurement device according to the present invention comprises: a light source that generates radiation mean; a first beam splitter that splits the radiation beam into a compensation beam and a measurement beam, and guides the measurement beam to a target; a second beam splitter that re-directs the compensation beam from the first beam splitter; a first optical detector that detects the compensation beam redirected from the second beam splitter, in which characteristics about parts of the first beam splitter and the second beam splitter are the same; and a second beam splitter that detects the measurement beam reflected from the target, and the measurement beam redirected from the first beam splitter.SELECTED DRAWING: Figure 6A |
