发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 A method of fabricating a semiconductor device includes preparing a substrate including a first region and a second region, sequentially forming a first semiconductor layer and a second semiconductor layer on the first and second regions, patterning the first and second semiconductor layers to form a lower semiconductor pattern and an upper semiconductor pattern on each of the first and second regions, selectively removing the lower semiconductor pattern on the second region to form a gap region, and forming gate electrodes at the first and second regions, respectively.
申请公布号 US2016372474(A1) 申请公布日期 2016.12.22
申请号 US201615249518 申请日期 2016.08.29
申请人 Samsung Electronics Co. Ltd. 发明人 YANG Junggil;KIM SANGSU;KWON TaeYong;HUR SUNG GI
分类号 H01L27/092;H01L21/306;H01L21/8238 主分类号 H01L27/092
代理机构 代理人
主权项
地址 Suwon-si KR