发明名称 VACUUM PUMPING SYSTEM AND METHOD OF OPERATION
摘要 <p>A pumping system for evacuating an enclosure comprises a pumping mechanism (30), a motor (32) for driving the pumping mechanism, and a controller (36) for controlling the motor. The controller sets a maximum value for a rotational frequency of the motor and a maximum value for a current in the motor, and, to optimise the performance of the pumping system, independently adjusts the maximum values during evacuation of the enclosure.</p>
申请公布号 EP1844237(A1) 申请公布日期 2007.10.17
申请号 EP20060701044 申请日期 2006.01.23
申请人 EDWARDS LIMITED 发明人 BRUCE, SIMON HAROLD
分类号 F04C25/02;F04B49/06;F04C23/00;F04C28/06;F04D27/00;F04D27/02 主分类号 F04C25/02
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