| 摘要 |
A high-density fine line structure mainly includes two semiconductor devices formed on the same surface, without stacking to each other. One of the semiconductor devices is directly installed on a fine line circuit layer, and the other semiconductor device is installed on the fine line circuit layer within a dielectric layer cavity. In the method of the present invention, electroplating rather than the etching method is used for forming the fine line circuit layer, and a carrier and a metal barrier layer, which are needed during or at the end of the manufacturing process, are removed to increase the wiring density for realizing the object of high-density.
|
