| 摘要 |
PROBLEM TO BE SOLVED: To reduce environmental noise in a charged particle beam device such as a scanning electron microscope, sample vibrations caused by vibrations of the device itself, and sample drift.SOLUTION: The present invention relates to a brake mechanism for releasing a sample holder from a rotary stage when a turntable, on which a sample holder is supported by a damping material, stops, and fixing the sample holder to the turntable when the rotary stage rotates. The present invention also relates to a brake mechanism which releases the sample holder from the turntable when the turntable is fixed to the sample stage, and fixes the sample holder to the turntable while the turntable is released from the sample stage.SELECTED DRAWING: Figure 6 |
