| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump which is suitable for preventing a control box from dropping off, for preventing breakage of a connector, and is suitable for the maintenance of required vacuum at the time of the breakage of a turbomolecular pump. SOLUTION: The control box 2 is attached to the attachment surface 1A of a pump case 1 through the medium of a sheet 3 having a first fastening part 31 and a second fastening part 32. The first fastening part 31 is fastened by a first fastening bolt 41, and the second fastening part 32 is fastened to the pump case 1 with a second bolt 42. When a large impactive force in the direction of pump rotary operation is exerted on the pump case 1, the impactive force is absorbed by the bending of the sheet 3. COPYRIGHT: (C)2007,JPO&INPIT |
